Design Optimization and Performance Projections of Double-Gate FinFETs With Gate–Source/Drain Underlap for SRAM Application

Physical device/circuit simulations are used to explore 6T-SRAM cell design and scaling using double-gate (DG) FinFETs with optimized gate-source/drain (G-S/D) underlap. The underlap is designed for the control of threshold voltage (V_t) in the nanoscale FinFET with undoped ultrathin body (UTB). DG FinFETs with underlap are first characterized in terms of for various S/D-extension lengths (L_ext), lateral doping-density straggles (sigma_L), and fin-UTB thicknesses (w_Si). The relation between and read-static noise margin (SNM) is established to define an optimal SRAM cell, for the Semiconductor Industry Association´s International Technology Roadmap for Semiconductors (ITRS) HP45 node with L_g=18 nm, with large SNM as well as large write-0 margin and good immunity to process-induced variations of L_ext, sigma_L, w_Si, and L_g. Then, a scalability study of the DG FinFET-based SRAM cell is done, showing a continual significant benefit of the optimally designed doable underlaps to the end of the ITRS. In addition to the SRAM application, the novel idea of FinFET V_t control via underlap design is stressed, and its application to high-performance CMOS is discussed.