Characteristics and simulations of the planar multi-layer spiral coil and the miniature opto-electric transformer

Author

Kimura, M. ; Hayasaki, J.

Author_Institution

Dept. of Electr. Eng., Tohoku-Gakuin Univ., Miyagi, Japan

Volume

29

Issue

6

fYear

1993

fDate

11/1/1993 12:00:00 AM

Firstpage

3216

Lastpage

3218

Abstract

The characteristics of a miniature optoelectric transformer (MOET) and simulations for the MOET based on the simple improved model for L, C and R of the multilayer coil with the outer closed core are shown. The circuit simulations are performed by a PSPICE simulator, and experimental results can be explained by these simulations. Simulations for a very small MOET of about 200 μm are performed and discussed. A new method to form the substantially flat spiral coil, in which anodic oxidation of the deposited Al film is used, is proposed to overcome the unevenness problem arising from increasing the etched Al coil thickness

Keywords

SPICE; coils; micromechanical devices; photoelectric devices; transformers; 200 microns; Al film; PSPICE simulator; anodic oxidation; flat spiral coil; miniature optoelectric transformer; outer closed core; p-n junction photocell; planar multilayer spiral coil; simulations; Circuit simulation; Coils; Magnetic cores; Magnetic films; Magnetic multilayers; Nonhomogeneous media; Optical films; Oxidation; Spirals; Transformer cores;

fLanguage

English

Journal_Title

Magnetics, IEEE Transactions on

Publisher

ieee

ISSN

0018-9464

Type

jour

DOI

10.1109/20.281141

Filename

281141