DocumentCode
1074604
Title
Equilibrium of hinged and hingeless structures rotated using surface tension forces
Author
Syms, R.R.A.
Author_Institution
Dept. of Electr. & Electron. Eng., Imperial Coll. of Sci., Technol. & Med., London, UK
Volume
4
Issue
4
fYear
1995
fDate
12/1/1995 12:00:00 AM
Firstpage
177
Lastpage
184
Abstract
Two different geometries for the rotation of microstructures by the surface tension force of molten solder are investigated theoretically and experimentally. The geometries are based on structures with and without a hinge acting to constrain the motion of a flap to pure rotation. The equilibrium geometry of a hinged structure is first found analytically by considering the surface energy of the solder. An analysis of hingeless structures is then performed that shows a hinge to be unnecessary under certain conditions. Macroscopic experiments performed using printed circuit board parts are then described; the results show that the behaviors of hinged and hingeless structures are similar
Keywords
force; micromechanical devices; rotation; surface tension; equilibrium geometry; hinged structures; hingeless structures; microstructure rotation; molten solder; solder surface energy; surface tension forces; Chemicals; Dry etching; Fasteners; Geometry; Optical devices; Performance analysis; Printed circuits; Surface tension; Torque; Wet etching;
fLanguage
English
Journal_Title
Microelectromechanical Systems, Journal of
Publisher
ieee
ISSN
1057-7157
Type
jour
DOI
10.1109/84.475544
Filename
475544
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