On the Mode-Matched Control of MEMS Vibratory Gyroscope via Phase-Domain Analysis and Design

This paper investigates a novel method for the mode-matched control of a microelectromechanical systems (MEMS) vibratory gyroscope through a phase-domain analysis. Compared with the previous works, the proposed method presents a simple and robust automatic mode tuning scheme for sensitivity enhancement. In designing the mode-matched control loop, the resonant characteristics of the driving axis are used as the reference mode. Then, the phase difference between sense and drive modes at the resonant frequency of drive mode is used to generate a control signal for phase error regulation. For the control loop design, a linear phase-locked loop is adapted. Through the simulation using practical MEMS gyroscope parameters, the mode-matching performance and robustness of the designed control loop is demonstrated. It is also shown that coupling effect yields no degradation of output sensitivity. Finally, the experimental results obtained by implementing the electronics of mode-matched control verify the feasibility of the proposed method.