DocumentCode

1075979

Title

IVB-7 direct observation of lateral redistribution profiles of shallow ion implants

Author

Roitman, P. ; Myers, D.R. ; Wilson, Roland ; Garvin, H.

Volume

28

Issue

10

fYear

1981

fDate

10/1/1981 12:00:00 AM

Firstpage

1240

Lastpage

1241

Keywords

Amorphous materials; Annealing; Etching; Gettering; Implants; MOSFETs; Oxygen; Scanning electron microscopy; Silicon; Transmission electron microscopy;

fLanguage

English

Journal_Title

Electron Devices, IEEE Transactions on

Publisher

ieee

ISSN

0018-9383

Type

jour

DOI

10.1109/T-ED.1981.20564

Filename

1481716