• DocumentCode
    1077459
  • Title

    Improvements in aluminum-silicon Schottky barriers due to processing with a pulsed ruby laser

  • Author

    McGonigal, G.C. ; Card, H.C.

  • Author_Institution
    University of Manitoba, Manitoba, Canada
  • Volume
    2
  • Issue
    6
  • fYear
    1981
  • fDate
    6/1/1981 12:00:00 AM
  • Firstpage
    149
  • Lastpage
    151
  • Abstract
    Improvements in Schottky barrier characteristics (increases in barrier heights and reductions in n-values or ideality factors) have been obtained for aluminum-n-type silicon contacts upon irradiation of single (1 msec) pulses from a ruby laser (λ = 0.694 µm). Increases in φbof up to 0.2 volts and decreases in n by a factor of ≃ 2 have been observed for optical pulse energies in the range of 25-40 J cm-2.
  • Keywords
    Aluminum; Annealing; Contacts; Integrated circuit technology; Laser beams; Optical pulses; Research and development; Schottky barriers; Silicon; Voltage;
  • fLanguage
    English
  • Journal_Title
    Electron Device Letters, IEEE
  • Publisher
    ieee
  • ISSN
    0741-3106
  • Type

    jour

  • DOI
    10.1109/EDL.1981.25377
  • Filename
    1481861