DocumentCode
1077459
Title
Improvements in aluminum-silicon Schottky barriers due to processing with a pulsed ruby laser
Author
McGonigal, G.C. ; Card, H.C.
Author_Institution
University of Manitoba, Manitoba, Canada
Volume
2
Issue
6
fYear
1981
fDate
6/1/1981 12:00:00 AM
Firstpage
149
Lastpage
151
Abstract
Improvements in Schottky barrier characteristics (increases in barrier heights and reductions in n-values or ideality factors) have been obtained for aluminum-n-type silicon contacts upon irradiation of single (1 msec) pulses from a ruby laser (λ = 0.694 µm). Increases in φb of up to 0.2 volts and decreases in n by a factor of ≃ 2 have been observed for optical pulse energies in the range of 25-40 J cm-2.
Keywords
Aluminum; Annealing; Contacts; Integrated circuit technology; Laser beams; Optical pulses; Research and development; Schottky barriers; Silicon; Voltage;
fLanguage
English
Journal_Title
Electron Device Letters, IEEE
Publisher
ieee
ISSN
0741-3106
Type
jour
DOI
10.1109/EDL.1981.25377
Filename
1481861
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