DocumentCode
1078316
Title
A graphical representation of the piezoresistance coefficients in silicon
Author
Kanda, Yasunari ; Kanda, Yozo
Author_Institution
Hamamatsu University School of Medicine, Hamamatsu, Japan
Volume
29
Issue
1
fYear
1982
fDate
1/1/1982 12:00:00 AM
Firstpage
64
Lastpage
70
Abstract
The longitudinal and transverse piezoresistance coefficients, Π(300 K), at room temperature are plotted as a function of the crystal directions for orientations in the
Keywords
Anisotropic magnetoresistance; Capacitive sensors; Germanium; Immune system; Piezoresistance; Process design; Semiconductor impurities; Silicon; Temperature sensors; Tensile stress;
fLanguage
English
Journal_Title
Electron Devices, IEEE Transactions on
Publisher
ieee
ISSN
0018-9383
Type
jour
DOI
10.1109/T-ED.1982.20659
Filename
1482156
Link To Document