DocumentCode

1081913

Title

VB-11 InP annealing studies

Author

Streetman, B.G.

Volume

29

Issue

10

fYear

1982

fDate

10/1/1982 12:00:00 AM

Firstpage

1700

Lastpage

1701

Keywords

Annealing; Electron traps; Fabrication; Hot carriers; Implants; Indium phosphide; Ion implantation; MOSFET circuits; Microwave devices; Pollution measurement;

fLanguage

English

Journal_Title

Electron Devices, IEEE Transactions on

Publisher

ieee

ISSN

0018-9383

Type

jour

DOI

10.1109/T-ED.1982.20996

Filename

1482493