A volume-perturbation approach to the problem of Rayleigh wave scattering at a rectangular groove

Author

Jeoti, Varun ; Jhunjhunwala, Ashok

Author_Institution

Dept. of Electr. Eng., Indian Inst. of Technol., Madras, India

Volume

39

Issue

1

fYear

1992

Firstpage

127

Lastpage

137

Abstract

The problem of scattering of Rayleigh waves at a rectangular groove is addressed. Grooves are known to excite bulk waves upon scattering and, hence, are potential sources (albeit secondary) in bulk-acoustic-wave (BAW) devices. The groove is formulated as a volume perturbation of the geometry. A modal method is used, and the results of Rayleigh wave reflection as well as bulk wave radiation are obtained and compared with the results available in the literature. The method is compared with the boundary perturbation formulation. The equivalence of the boundary perturbation method and the volume perturbation method is shown.<>

Keywords

Rayleigh waves; perturbation theory; surface acoustic waves; ultrasonic reflection; ultrasonic scattering; LiNbO/sub 3/; Rayleigh wave reflection; Rayleigh wave scattering; SAW; SiO/sub 2/; boundary perturbation method; bulk acoustic wave scattering; bulk wave radiation; modal method; quartz; rectangular groove; volume-perturbation approach; Acoustic scattering; Optical reflection; Optical scattering; Optical surface waves; Perturbation methods; Rayleigh scattering; Rough surfaces; Surface acoustic waves; Surface roughness; Surface waves;

fLanguage

English

Journal_Title

Ultrasonics, Ferroelectrics, and Frequency Control, IEEE Transactions on

Publisher

ieee

ISSN

0885-3010

Type

jour

DOI

10.1109/58.166820

Filename

166820