DocumentCode
1083264
Title
A thin-membrane surface-acoustic-wave vapor-sensing device
Author
Chuang, C.T. ; White, R.M. ; Bernstein, J.J.
Author_Institution
IBM T. J. Watson Research Center, Yorktown Heights, NY, USA
Volume
3
Issue
6
fYear
1982
fDate
6/1/1982 12:00:00 AM
Firstpage
145
Lastpage
148
Abstract
An integrated silicon-based vapor sensor is realized with a ZnO-on-Si surface-acoustic-wave (SAW) oscillator containing an absorptive polymer located on a thinned, membrane region of the device. If the membrane thickness is comparable with or smaller than a SAW wavelength, wave energy is present at both membrane surfaces. Thus the SAW transducers and associated amplifiers can be protected by an enclosure, leaving only the polymer exposed to the ambient atmosphere. Experiments on a 30 MHz, ZnO-on-silicon thin-membrane temperature-compensated SAW oscillator for vapor sensing are described. The use of the multi-channel device for solubility parameter sensing is discussed.
Keywords
Atmosphere; Biomembranes; Frequency; Lithium niobate; Oscillators; Polymer films; Substrates; Surface acoustic waves; Surface waves; Transducers;
fLanguage
English
Journal_Title
Electron Device Letters, IEEE
Publisher
ieee
ISSN
0741-3106
Type
jour
DOI
10.1109/EDL.1982.25517
Filename
1482622
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