• DocumentCode
    1086413
  • Title

    A multigrid method for solution of the diffusion equation in VLSI process modeling

  • Author

    Seidl, Albert

  • Author_Institution
    Institut für Festkörpertechnologie, München, Germany
  • Volume
    30
  • Issue
    9
  • fYear
    1983
  • fDate
    9/1/1983 12:00:00 AM
  • Firstpage
    999
  • Lastpage
    1004
  • Abstract
    If an implicit time discretization method is used for the diffusion equation, a large equation system has to be solved. In this work, a ν-cycle multigrid method was employed for this purpose. It can be easily applied to any 9-point approximation for nonlinear second-order differential operators, requires no iteration parameters, and can compete with other fast solvers [7]. The storage needed is 6 times the number of grid points.
  • Keywords
    Arithmetic; Boundary conditions; Gaussian processes; Helium; Multigrid methods; Nonlinear equations; Oxidation; Poisson equations; Silicon; Very large scale integration;
  • fLanguage
    English
  • Journal_Title
    Electron Devices, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    0018-9383
  • Type

    jour

  • DOI
    10.1109/T-ED.1983.21253
  • Filename
    1483154
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1086413