• DocumentCode
    1088087
  • Title

    VA-8 germanium MISFETs exhibiting low interface state density using Ge3N4gate insulator

  • Author

    Rosenberg, James J.

  • Author_Institution
    Columbia University
  • Volume
    30
  • Issue
    11
  • fYear
    1983
  • fDate
    11/1/1983 12:00:00 AM
  • Firstpage
    1602
  • Lastpage
    1602
  • Keywords
    Analog circuits; Charge carrier processes; Dielectrics and electrical insulation; Electron mobility; FETs; Fabrication; Gallium arsenide; Germanium; Interface states; MISFETs;
  • fLanguage
    English
  • Journal_Title
    Electron Devices, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    0018-9383
  • Type

    jour

  • DOI
    10.1109/T-ED.1983.21396
  • Filename
    1483297