DocumentCode

1088108

Title

VB-2 vertically integrated CMOS devices built on laser recrystallized polysilicon films

Author

Ramono, R.

Volume

30

Issue

11

fYear

1983

fDate

11/1/1983 12:00:00 AM

Firstpage

1603

Lastpage

1604

Keywords

CMOS process; CMOS technology; Circuit testing; Inverters; Isolation technology; MOS devices; Resistors; Silicon; Substrates; Subthreshold current;

fLanguage

English

Journal_Title

Electron Devices, IEEE Transactions on

Publisher

ieee

ISSN

0018-9383

Type

jour

DOI

10.1109/T-ED.1983.21398

Filename

1483299