DocumentCode
1089915
Title
Stacked CMOS SRAM cell
Author
Chen, C.E. ; Lam, H.W. ; Malhi, S.D.S. ; Pinizzotto, R.F.
Author_Institution
Texas Instruments, Inc., Dallas, TX
Volume
4
Issue
8
fYear
1983
fDate
8/1/1983 12:00:00 AM
Firstpage
272
Lastpage
274
Abstract
A static random access memory (SRAM) cell with cross-coupled stacked CMOS inverters is demonstrated for the first time. In this approach, CMOS inverters are fabricated with a laser recrystallized p-channel device stacked on top of and sharing the gate with a bulk n-channel device using a modified two-polysilicon n-MOS process. The memory cell has been exercised through the write and read cycles with external signal generators while the output is buffered by an on-chip, stacked-CMOS-inverter-based amplifier.
Keywords
Circuit testing; Coatings; Etching; Laser modes; MOS devices; Power lasers; Random access memory; Silicon; Thermal stresses; Threshold voltage;
fLanguage
English
Journal_Title
Electron Device Letters, IEEE
Publisher
ieee
ISSN
0741-3106
Type
jour
DOI
10.1109/EDL.1983.25730
Filename
1483474
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