• DocumentCode
    1091372
  • Title

    Etched mirror and groove-coupled GaInAsP/InP laser devices for integrated optics

  • Author

    Coldren, Larry A. ; Furuya, Kazuhito ; Miller, Barry I. ; Rentschler, John A.

  • Author_Institution
    University of California, Santa Barbara, CA
  • Volume
    18
  • Issue
    10
  • fYear
    1982
  • fDate
    10/1/1982 12:00:00 AM
  • Firstpage
    1679
  • Lastpage
    1688
  • Abstract
    Recent advances in wet and dry etching techniques for GaInAsP/InP laser structures allow the reproducible fabrication of planar and vertical walled facets and grooves. These elements provide efficient mirrors and interstage couplers that may provide the basis for a new generation of monolithic integrated optical devices. Initial experimental results on etched facet lasers and groove-coupled two-section lasers verify theoretical expectations.
  • Keywords
    Gallium materials/lasers; Integrated optics; Laser couplers; Laser resonators; Chemical lasers; Dry etching; Indium phosphide; Integrated optics; Laser theory; Mirrors; Optical coupling; Optical devices; Reproducibility of results; Wet etching;
  • fLanguage
    English
  • Journal_Title
    Quantum Electronics, IEEE Journal of
  • Publisher
    ieee
  • ISSN
    0018-9197
  • Type

    jour

  • DOI
    10.1109/JQE.1982.1071404
  • Filename
    1071404