SOI CMOS compatible low-power microheater optimization for the fabrication of smart gas sensors

Author

Laconte, Jean ; Dupont, Cédric ; Flandre, Denis ; Raskin, Jean-Pierre

Author_Institution

Res. Center in Micro & Nanoscopic Electron. Devices & Mater., Univ. catholique de Louvain, Louvain-la-Neuve, Belgium

Volume

4

Issue

5

fYear

2004

Firstpage

670

Lastpage

680

Abstract

In this paper, an original design of a polysilicon loop-shaped microheater on a 1-μm thin-stacked dielectric membrane is presented. This design ensures high thermal uniformity and insulation and very low power consumption (20 mW for heating at 400°C). Moreover, the use of completely CMOS compatible tetramethyl ammonium hydroxide-based bulk-micromachining techniques allows an easy, smart gas sensor integration in SOI-CMOS technology.

Keywords

CMOS integrated circuits; circuit optimisation; gas sensors; intelligent sensors; low-power electronics; micromachining; silicon-on-insulator; 20 mW; 400 C; SOI-CMOS technology; bulk micromachining; low-power microheater optimization; polysilicon loop-shaped microheater; silicon-on-insulator; smart gas sensors; tetramethyl ammonium hydroxide-based bulk-micro-machining techniques; thermal uniformity; Biomembranes; CMOS technology; Conductivity; Dielectrics; Etching; Fabrication; Gas detectors; Micromachining; Silicon on insulator technology; Temperature sensors; Bulk micromachining; CMOS- compatibility; gas sensor; microheater; silicon-on-insulator;

fLanguage

English

Journal_Title

Sensors Journal, IEEE

Publisher

ieee

ISSN

1530-437X

Type

jour

DOI

10.1109/JSEN.2004.833516

Filename

1331375