DocumentCode
1093234
Title
Preparation of a clean GaAs
Author
Sinharoy, Samar ; Hoffman, Ryan A. ; Hoffman, Richard A.
Author_Institution
Westinghouse R&D Center, Pittsburgh, PA
Volume
31
Issue
8
fYear
1984
fDate
8/1/1984 12:00:00 AM
Firstpage
1090
Lastpage
1092
Abstract
We describe a procedure for producing a clean surface of GaAs
Keywords
Argon; Diffraction; Electrons; Face detection; Gallium arsenide; Spectroscopy; Substrates; Surface cleaning; Surface reconstruction; Surface treatment;
fLanguage
English
Journal_Title
Electron Devices, IEEE Transactions on
Publisher
ieee
ISSN
0018-9383
Type
jour
DOI
10.1109/T-ED.1984.21667
Filename
1483952
Link To Document