Development of a 60-GHz Bandpass Filter and a Dipole Antenna Using Wafer Transfer Technology

The development of a low-insertion-loss bandpass filter and a dipole antenna using wafer transfer technology (WTT) for 60-GHz band applications is presented for the first time. The WTT process provides a much higher fabrication accuracy than the traditional printed circuit board/thick-film process. In addition, the WTT also provides a new way to transfer millimeter-wave circuits from the high-loss Si substrate to low-loss microwave substrates like the Rogers RT/Duroid 5880. The bandpass filter has a measured 3-dB bandwidth of 12 GHz, and the measured minimum insertion loss is 1.8 dB. The dipole antenna has shown a measured frequency bandwidth from 56 to 61.5 GHz for |S11| less than -10 dB and a measured gain of 5.1 dB at 60 GHz. Compared with the integrated bandpass filter and antennas on CMOS, the WTT shows to be very promising for 60-GHz applications.