Preparation of thin film high temperature superconductors

Author

Xi, X.X. ; Venkatesan, T. ; Li, Q. ; Wu, X.D. ; Inam, A. ; Chang, C.C. ; Ramesh, R. ; Hwang, D.M. ; Ravi, T.S. ; Findikoglu, A. ; Hemmick, D. ; Etemad, S. ; Martinez, J.A. ; Wilkens, B.

Author_Institution

Dept. of Phys., Rutgers Univ., Piscataway, NJ, USA

Volume

27

Issue

2

fYear

1991

fDate

3/1/1991 12:00:00 AM

Firstpage

982

Lastpage

989

Abstract

Fundamental issues in preparing high-quality high-T_c YBa₂Cu₃O_7-x thin films are addressed. The techniques of inverted cylindrical magneton sputtering and pulsed laser deposition are chosen as successful examples to illustrate how the key problems can be solved. The fabrication of YBa₂Cu₃O_7-x/PrBa₂Cu₃O_7-x superlattices where superconductivity in a single unit cell layer of YBa ₂Cu₃O_7-x was observed demonstrates the state of the art of thin-film deposition of high-T_c materials. Systematic variations of the deposition parameters result in changes of superconducting and structural properties of the films that correlate with their microwave and infrared characteristics

Keywords

barium compounds; high-temperature superconductors; praseodymium; sputter deposition; superconducting thin films; superlattices; vapour deposition; yttrium compounds; YBa₂Cu₃O_7-x; YBa₂Cu₃O_7-x-PrBa₂Cu ₃O_7-x superlattices; fabrication; high temperature superconductors; infrared characteristics; inverted cylindrical magneton sputtering; microwave characteristics; preparation; pulsed laser deposition; structural properties; thin film; High temperature superconductors; Optical device fabrication; Optical pulses; Pulsed laser deposition; Sputtering; Superconducting films; Superconducting magnets; Superconducting thin films; Superconductivity; Superlattices;

fLanguage

English

Journal_Title

Magnetics, IEEE Transactions on

Publisher

ieee

ISSN

0018-9464

Type

jour

DOI

10.1109/20.133345

Filename

133345