DocumentCode
1104158
Title
Self-aligned notched planar InP transferred-electron oscillators
Author
Binari, S.C. ; Thompson, P.E. ; Grubin, H.L.
Author_Institution
Naval Research Laboratory, Washington, DC
Volume
6
Issue
1
fYear
1985
fDate
1/1/1985 12:00:00 AM
Firstpage
22
Lastpage
24
Abstract
A procedure is described for the fabrication of planar InP transferred-electron oscillators (TEO´s). In this procedure, a localized high resistivity region is self-aligned to the cathode contact. The self-aligned structure, which also included a selectively implanted n+ anode, produced a pulsed power output of 220 mW with an efficiency of 9.5 percent at 9.1 GHz and a CW power output of 80 mW with an efficiency of 5.3 percent at 5.5 GHz. This is the highest reported power output and efficiency for a planar transferred-electron device in this frequency range.
Keywords
Anodes; Cathodes; Conductivity; Fabrication; Frequency; Indium phosphide; Metallization; Microwave devices; Oscillators; Silicon;
fLanguage
English
Journal_Title
Electron Device Letters, IEEE
Publisher
ieee
ISSN
0741-3106
Type
jour
DOI
10.1109/EDL.1985.26029
Filename
1485182
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