Experimental design of exit wave reconstruction from a transmission electron microscope defocus series

Author

Miedema, Martijn A O ; Van den Bos, Adriaan ; Buist, A.H.

Author_Institution

Dept. of Appl. Phys., Delft Univ. of Technol., Netherlands

Volume

43

Issue

2

fYear

1994

fDate

4/1/1994 12:00:00 AM

Firstpage

181

Lastpage

186

Abstract

Recently published methods reconstruct the complex exit wave of the specimen in a transmission electron microscope by combining a number of images recorded at different defocus values. An expression is derived for the variance of the reconstructed wave as a function of the experimental parameters that can be freely chosen. It is shown how these parameters can be used for experimental design, that is, for minimizing the variance of the reconstructed wave

Keywords

electron microscopy; electron optics; fast Fourier transforms; image reconstruction; linearisation techniques; transfer functions; transmission electron microscopes; complex exit wave; defocus series; defocus values; error sources; exit wave reconstruction; experimental parameters; image reconstruction; nonlinear imaging model; reconstructed wave; transmission electron microscope; Design for experiments; Electron microscopy; Equations; Fourier transforms; Frequency; Image reconstruction; Instrumentation and measurement; Optical microscopy; Transfer functions; Transmission electron microscopy;

fLanguage

English

Journal_Title

Instrumentation and Measurement, IEEE Transactions on

Publisher

ieee

ISSN

0018-9456

Type

jour

DOI

10.1109/19.293417

Filename

293417