• DocumentCode
    1109628
  • Title

    Trimming phase and birefringence errors in planar lightwave circuits with deep ultraviolet femtosecond laser

  • Author

    Chen, Q. ; Chen, K.P. ; Buric, M. ; Nikumb, S.

  • Author_Institution
    Integrated Manuf. Technol. Inst., Nat. Res. Council of Canada, London, Ont., Canada
  • Volume
    40
  • Issue
    19
  • fYear
    2004
  • Firstpage
    1179
  • Lastpage
    1181
  • Abstract
    A deep ultraviolet femtosecond laser was employed to trim phase and birefringence errors in silica planar lightwave circuits. A permanent refractive index change of ∼3.8×10-4 and a birefringence change of 1.0×10-4 were induced in hydrogen-free Mach-Zehnder planar waveguide circuits. The ultrafast laser enhances the ultraviolet photosensitivity response in silica waveguides by two orders of magnitude greater than that of a nanosecond 248 nm KrF excimer laser.
  • Keywords
    Mach-Zehnder interferometers; birefringence; errors; high-speed optical techniques; laser beam machining; optical planar waveguides; refractive index; silicon compounds; KrF excimer laser; SiO2; birefringence errors; deep ultraviolet femtosecond laser; hydrogen free Mach-Zehnder planar waveguide circuit; planar lightwave circuits; refractive index; silica waveguies; trimming phase errors; ultraviolet photosensitivity;
  • fLanguage
    English
  • Journal_Title
    Electronics Letters
  • Publisher
    iet
  • ISSN
    0013-5194
  • Type

    jour

  • DOI
    10.1049/el:20045975
  • Filename
    1336636
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1109628