DocumentCode
1110418
Title
An algorithm to find two-dimensional signals with specified zero crossings
Author
Sayegh, Soheil I. ; Kok, Yon-Lin ; Hong, Joo-Heng
Author_Institution
Michigan State University, East Lansing, MI
Volume
35
Issue
1
fYear
1987
fDate
1/1/1987 12:00:00 AM
Firstpage
107
Lastpage
111
Abstract
We present an iterative method for finding two-dimensional band-limited functions with predetermined zero crossings. This problem arises when we want to generate a prescribed binary image at the output of a diffraction-limited imaging system with high-contract recording. An important application of this image generation problem is in the design of masks for microlithography. After describing the algorithm, a proof of its convergence, based on the properties of nonexpansive mappings, is given. The relevance of this algorithm to the image construction problem is then discussed, and we conclude by illustrating two patterns generated by our proposed method.
Keywords
Cameras; Convergence; Diffraction; Frequency domain analysis; Helium; Image generation; Iterative algorithms; Iterative methods; Linear programming; Signal processing algorithms;
fLanguage
English
Journal_Title
Acoustics, Speech and Signal Processing, IEEE Transactions on
Publisher
ieee
ISSN
0096-3518
Type
jour
DOI
10.1109/TASSP.1987.1165021
Filename
1165021
Link To Document