DocumentCode
1111097
Title
VB-3 noninvasive optical sheet charge density probe for silicon integrated circuits
Author
Heinrich, H.K. ; Bloom, D.M. ; Hemenway, B.R. ; McGroddy, K. ; Keller, Ulrich
Volume
33
Issue
11
fYear
1986
fDate
11/1/1986 12:00:00 AM
Firstpage
1860
Lastpage
1860
Keywords
Circuit testing; Integrated optics; Optical beams; Optical devices; Optical films; Optical interferometry; Optical sensors; Photonic integrated circuits; Probes; Silicon;
fLanguage
English
Journal_Title
Electron Devices, IEEE Transactions on
Publisher
ieee
ISSN
0018-9383
Type
jour
DOI
10.1109/T-ED.1986.22815
Filename
1486032
Link To Document