• DocumentCode
    1112953
  • Title

    Accuracy of effective channel-length extraction using the capacitance method

  • Author

    Yao, C.T. ; Mack, Ingham A. ; Lin, Hung C.

  • Author_Institution
    Sachs/Freeman Associates, Landover, MD
  • Volume
    7
  • Issue
    4
  • fYear
    1986
  • fDate
    4/1/1986 12:00:00 AM
  • Firstpage
    268
  • Lastpage
    270
  • Abstract
    A comparison of two different methods for measuring the effective channel length of a MOSFET has been made. It has been determined the effective channel length obtained by the direct capacitance method depends on doping concentration and concentration gradient of the source-drain junctions. Due to the inner fringing capacitance and turn-on of the source-drain regions, the capacitance method tends to predict a longer effective channel length as compared to the resistance method.
  • Keywords
    Calibration; Capacitance measurement; Electrical resistance measurement; Frequency conversion; Laboratories; Length measurement; Linear regression; MOSFET circuits; Testing; Threshold voltage;
  • fLanguage
    English
  • Journal_Title
    Electron Device Letters, IEEE
  • Publisher
    ieee
  • ISSN
    0741-3106
  • Type

    jour

  • DOI
    10.1109/EDL.1986.26368
  • Filename
    1486191
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1112953