• DocumentCode
    1115460
  • Title

    Viscosity response of shear horizontal surface acoustic wave on AlN=sapphire structure

  • Author

    Hu, G. ; Xu, J. ; Auner, G.W. ; Smolinski, J. ; Ying, H.

  • Author_Institution
    Wayne State Univ., Detroit
  • Volume
    43
  • Issue
    18
  • fYear
    2007
  • Firstpage
    1006
  • Lastpage
    1007
  • Abstract
    The effect of viscous liquid loading on SH-SAW devices on AlN/sapphire structure has been experimentally investigated. The sensitivity of the devices to liquid (glycerol/water mixtures) viscosity changes is measured to be approximate 8.2 times 10-9 m2 s/kg, which is only about 30% of that of commonly used quartz Love wave devices. This indicates that, when used for mass sensing in liquid the AlN SH-SAW devices have better tolerance to viscous perturbation.
  • Keywords
    Love waves; surface acoustic wave devices; viscosity; AlN-sapphire structure; SH-SAW devices; mass sensing; quartz Love wave devices; shear horizontal surface acoustic wave devices; viscosity response;
  • fLanguage
    English
  • Journal_Title
    Electronics Letters
  • Publisher
    iet
  • ISSN
    0013-5194
  • Type

    jour

  • DOI
    10.1049/el:20070769
  • Filename
    4299493
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1115460