• DocumentCode
    1116624
  • Title

    The design of a high-resolution AC parametric tester

  • Author

    Blacksin, Jeffrey M. ; Megna, Frederick J.

  • Author_Institution
    Digital Equipment Corporation, Hudson, MA
  • Volume
    34
  • Issue
    5
  • fYear
    1987
  • fDate
    5/1/1987 12:00:00 AM
  • Firstpage
    1179
  • Lastpage
    1183
  • Abstract
    We present the design for an automatic wafer-probing ac characterization system that provides 0.1-fF capacitance resolution at the wafer level. The most important difficulties that had to be overcome were: the presence of parasitic elements in the measurement circuit, the design of a probe-card system, and the development of user-friendly system software.
  • Keywords
    Admittance; Capacitance; Electron devices; Equations; Frequency measurement; Impedance; Integrated circuit modeling; Pins; Probes; Testing;
  • fLanguage
    English
  • Journal_Title
    Electron Devices, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    0018-9383
  • Type

    jour

  • DOI
    10.1109/T-ED.1987.23062
  • Filename
    1486773
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1116624