DocumentCode
1118780
Title
IIIB-8 UPMOS—A new approach to submicrometer VLSI
Author
Foo, P.D. ; Liu, Richard ; Orlowsky, K.J. ; Hillenius ; Lynch, W.T.
Volume
34
Issue
11
fYear
1987
fDate
11/1/1987 12:00:00 AM
Firstpage
2368
Lastpage
2369
Keywords
Annealing; Capacitance; Contact resistance; Cutoff frequency; Electrical resistance measurement; Etching; Ion implantation; MOSFET circuits; Silicon; Very large scale integration;
fLanguage
English
Journal_Title
Electron Devices, IEEE Transactions on
Publisher
ieee
ISSN
0018-9383
Type
jour
DOI
10.1109/T-ED.1987.23275
Filename
1486986
Link To Document