DocumentCode
1118837
Title
IVA-5 refractory p-ohmic-contact to GaAs and Gax Al1-x As (x ~ 0.3) based on diffusion of Zn in a rapid thermal furnace
Author
Tiwari, Sunita ; Callegari, A. ; Wright, S.
Volume
34
Issue
11
fYear
1987
fDate
11/1/1987 12:00:00 AM
Firstpage
2370
Lastpage
2371
Keywords
Electrical resistance measurement; Electrons; Gallium arsenide; Heterojunction bipolar transistors; Implants; Ohmic contacts; Optical films; Rapid thermal processing; Solids; Zinc;
fLanguage
English
Journal_Title
Electron Devices, IEEE Transactions on
Publisher
ieee
ISSN
0018-9383
Type
jour
DOI
10.1109/T-ED.1987.23281
Filename
1486992
Link To Document