DocumentCode

1118896

Title

IVB-2 memory effect and enhanced conductivity in Si-implanted thermally grown SiO2

Author

Kalnitsky, Alex ; King, M.I.H. ; Boothroyd, A.R. ; Ellul, J.P.

Volume

34

Issue

11

fYear

1987

fDate

11/1/1987 12:00:00 AM

Firstpage

2372

Lastpage

2372

Keywords

Annealing; Contacts; Dielectrics; EPROM; Electron traps; Material storage; Nonvolatile memory; Optical refraction; Thermal conductivity; Thermal stresses;

fLanguage

English

Journal_Title

Electron Devices, IEEE Transactions on

Publisher

ieee

ISSN

0018-9383

Type

jour

DOI

10.1109/T-ED.1987.23286

Filename

1486997