• DocumentCode
    1120186
  • Title

    High-accuracy tuning of planar millimeter-wave circuits by laser photochemical etching

  • Author

    Ehrlich, D.J. ; Williams, D.F. ; Sedlacek, J.H.C. ; Rothschild, M. ; Schwarz, Steven E.

  • Author_Institution
    M.I.T. Lincoln Laboratory, Lexington, MA
  • Volume
    8
  • Issue
    3
  • fYear
    1987
  • fDate
    3/1/1987 12:00:00 AM
  • Firstpage
    110
  • Lastpage
    112
  • Abstract
    A new laser photochemical reaction for etching of molybdenum has been applied to the in situ tuning of coplanar waveguide (CPW) structures used in millimeter wave integrated circuits. Tests on structures operating at 33 GHz have confirmed low insertion losses and demonstrated an improvement in set accuracy by a factor of 10-30 relative to previously developed strip or solder tuners.
  • Keywords
    Circuit optimization; Circuit testing; Coplanar waveguides; Etching; Insertion loss; Laser tuning; Millimeter wave circuits; Millimeter wave integrated circuits; Photochemistry; Waveguide lasers;
  • fLanguage
    English
  • Journal_Title
    Electron Device Letters, IEEE
  • Publisher
    ieee
  • ISSN
    0741-3106
  • Type

    jour

  • DOI
    10.1109/EDL.1987.26569
  • Filename
    1487119
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1120186