• DocumentCode
    1124227
  • Title

    Thermal and electroless deposition of copper on poly(tetrafluoroethylene-co-hexafluoropropylene) films modified by surface graft copolymerization

  • Author

    Yang, G.H. ; Kang, E.T. ; Neoh, K.G.

  • Author_Institution
    Dept. of Chem. Eng., Nat. Univ. of Singapore, Singapore
  • Volume
    25
  • Issue
    3
  • fYear
    2002
  • fDate
    8/1/2002 12:00:00 AM
  • Firstpage
    365
  • Lastpage
    373
  • Abstract
    Surface modification of Ar plasma-pretreated poly(tetrafluoroethylene-co-hexafluoropropylene) (FEP) film via UV-induced graft copolymerization, under atmospheric conditions, with 4-vinylpyridine (4VP), 2-vinylpyridine (2VP) and 1-vinylimidazole (VIDz) was carried out to improve the adhesion with the thermally evaporated and the electrolessly deposited copper. The surface composition and structure of the graft-copolymerized FEP films were characterized by X-ray photoelectron spectroscopy (XPS) and atomic force microscope (AFM), respectively. The electroless plating of copper on the graft-copolymerized FEP film could be carried out in the absence of sensitization by SnCl2 (the Sn-free activation process). The adhesion strength of the thermally evaporated and the electrolessly deposited copper on the FEP surfaces was affected by the type of monomers used for graft copolymerization and the surface graft concentration. The T-peel adhesion strengths of the electrolessly deposited copper on the 4VP, 2VP and VIDz graft-copolymerized FEP films with 90-s of Ar plasma pretreatment were about 9.8 N/cm, 7.3 N/cm and 4.9 N/cm, respectively.
  • Keywords
    adhesion; copper; dielectric thin films; electroless deposition; integrated circuit metallisation; polymerisation; vacuum deposition; Cu; T-peel; UV-induced graft copolymerization; X-ray photoelectron spectroscopy; adhesion strength; atomic force microscope; electroless deposition; electroless plating; poly(tetrafluoroethylene-co-hexafluoropropylene) films; surface composition; surface graft copolymerization; surface structure; thermally evaporated material; Adhesives; Argon; Atomic force microscopy; Chemicals; Copper; Metallization; Packaging; Plasma applications; Plasma x-ray sources; Polymers;
  • fLanguage
    English
  • Journal_Title
    Advanced Packaging, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    1521-3323
  • Type

    jour

  • DOI
    10.1109/TADVP.2002.805316
  • Filename
    1166572