DocumentCode
1125819
Title
Bohm velocity with a two-temperature distribution of negative particles
Author
Boswell, R.W. ; Lichtenberg, Allan J. ; Vender, David
Author_Institution
Plasma Res. Lab., Australian Nat. Univ., Canberra, ACT, Australia
Volume
20
Issue
2
fYear
1992
fDate
4/1/1992 12:00:00 AM
Firstpage
62
Lastpage
65
Abstract
A one-dimensional simulation of a low-pressure RF-driven discharge is used to verify the theoretical prediction of the Bohm velocity of ions at the sheath edge for a two-temperature electron distribution. Simulation results indicate that the Bohm velocity is geared to the cooler species, provided that it contains most of the electrons. A similar comparison is performed for an electronegative plasma
Keywords
high-frequency discharges; plasma kinetic theory; plasma sheaths; plasma simulation; Bohm velocity; electronegative plasma; ions; low-pressure RF-driven discharge; negative particles; one-dimensional simulation; sheath edge; two-temperature electron distribution; Electrons; Mechanical factors; Plasma density; Plasma measurements; Plasma sheaths; Plasma simulation; Plasma temperature; Predictive models; Probes; Temperature distribution;
fLanguage
English
Journal_Title
Plasma Science, IEEE Transactions on
Publisher
ieee
ISSN
0093-3813
Type
jour
DOI
10.1109/27.134025
Filename
134025
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