• DocumentCode
    1126957
  • Title

    Time-Resolved Optical Imaging of an AC Magnetron Discharge

  • Author

    Clarke, Gregory C B ; Kelly, Peter J. ; Bradley, James W.

  • Author_Institution
    Dept. of Electr. Eng. & Electron., Univ. of Liverpool, Liverpool
  • Volume
    36
  • Issue
    4
  • fYear
    2008
  • Firstpage
    1372
  • Lastpage
    1373
  • Abstract
    Magnetron sputtering has proved to be an important and versatile technique for the production of thin films. In this paper, time-resolved optical imaging has been used to investigate the effect of an alternating-current (ac) waveform on plasma emission. The results suggest the formation of a secondary discharge, during the positive half of the pulse cycle, that is adjacent to the magnetron´s anode.
  • Keywords
    high-frequency discharges; plasma diagnostics; AC magnetron discharge; alternating-current waveform; magnetron sputtering; plasma emission; secondary discharge; thin films; time-resolved optical imaging; Imaging; magnetrons; plasma applications;
  • fLanguage
    English
  • Journal_Title
    Plasma Science, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    0093-3813
  • Type

    jour

  • DOI
    10.1109/TPS.2008.920287
  • Filename
    4485012
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1126957