DocumentCode
1128080
Title
Laser wet etching of diffraction gratings in GaAs for integrated optics
Author
Matz, R. ; Matz, Richard
Author_Institution
Research Laboratories of Siemens AG, Muenchen, Germany
Volume
4
Issue
7
fYear
1986
fDate
7/1/1986 12:00:00 AM
Firstpage
726
Lastpage
729
Abstract
Submicrometer optical gratings with high-aspect ratios were produced in
Keywords
Holography; Integrated optics; Optical diffraction gratings; Chemical lasers; Diffraction gratings; Gallium arsenide; Holographic optical components; Integrated optics; Laser modes; Optical diffraction; Optical feedback; Optical surface waves; Wet etching;
fLanguage
English
Journal_Title
Lightwave Technology, Journal of
Publisher
ieee
ISSN
0733-8724
Type
jour
DOI
10.1109/JLT.1986.1074832
Filename
1074832
Link To Document