Surface-emitting device with embedded circular grating coupler for possible application to optoelectronic integrated devices

Author

Noda, S. ; Ishikawa, T. ; Imada, M. ; Sasaki, A.

Author_Institution

Dept. of Electron. Sci. & Eng., Kyoto Univ., Japan

Volume

7

Issue

12

fYear

1995

Firstpage

1397

Lastpage

1399

Abstract

A surface-emitting device with an embedded circular grating coupler is developed. A uniform grating coupler with 0.4-μm pitch and 0.15-μm depth is fabricated by electron beam lithography and reactive ion etching. The grating is well embedded by an overgrown layer. It is shown that the lasing oscillation is successfully achieved up to the measured temperature of 196 K where the absorption loss at the grating coupler is well suppressed, and a stable single-longitudinal-mode oscillation is obtained.

Keywords

diffraction gratings; electron beam lithography; integrated optoelectronics; laser cavity resonators; laser modes; laser stability; optical couplers; optical fabrication; semiconductor lasers; sputter etching; surface emitting lasers; 0.15 mum; 0.4 mum; 196 K; absorption loss; electron beam lithography; embedded circular grating coupler; grating coupler; laser diodes; lasing oscillation; optoelectronic integrated devices; overgrown layer; reactive ion etching; stable single-longitudinal-mode oscillation; surface-emitting device; uniform grating coupler; Character generation; Etching; Gratings; Indium phosphide; Integrated circuit interconnections; Lithography; Optical coupling; Resists; Silicon compounds; Substrates;

fLanguage

English

Journal_Title

Photonics Technology Letters, IEEE

Publisher

ieee

ISSN

1041-1135

Type

jour

DOI

10.1109/68.477261

Filename

477261