Progress in Chip-Scale Photonic Sensing

Author

Jokerst, N.M. ; Lin Luan ; Palit, Sarbani ; Royal, M. ; Dhar, S. ; Brooke, M. ; Tyler, Talmage

Author_Institution

Dept. of Electr. & Comput. Eng., Duke Univ., Durham, NC, USA

Volume

3

Issue

4

fYear

2009

Firstpage

202

Lastpage

211

Abstract

Chip-scale integrated planar photonic sensing systems for portable diagnostics and monitoring are emerging, as photonic components are integrated into systems with silicon (Si), Si complementary metal-oxide semiconductor, and fluidics. This paper reviews progress in these areas. Medical and environmental applications, candidate photonic sensors, integration methodologies, integrated subsystem demonstrations, and challenges facing this emerging field are discussed in this paper.

Keywords

MIS devices; elemental semiconductors; integrated optics; integrated optoelectronics; optical sensors; portable instruments; silicon; Si; candidate photonic sensors; chip-scale integrated planar photonic sensing system; complementary metal-oxide semiconductor; integrated subsystem demonstrations; integration methodologies; portable diagnostics; portable monitoring; Biomedical monitoring; Costs; Diseases; Medical diagnostic imaging; Optical sensors; Optoelectronic and photonic sensors; Photonic integrated circuits; Sensor systems; Silicon; Water resources; Chip-scale sensing; chip-scale systems; heterogeneous integration; hybrid integration; integrated lasers; integrated sensing; integrated sensors; interferometers; microresonators; optical integration; optoelectronic integration; photodetectors; planar photonic system; planar photonics; sensing;

fLanguage

English

Journal_Title

Biomedical Circuits and Systems, IEEE Transactions on

Publisher

ieee

ISSN

1932-4545

Type

jour

DOI

10.1109/TBCAS.2009.2020693

Filename

5169875