DocumentCode

1142792

Title

Surface-micromachined MEMS acoustic sensor with bottom electrode anchor

Author

Lee, J. ; Kim, H.J. ; Lee, S.Q. ; Lee, S.K. ; Ko, S.C. ; Park, K.H.

Volume

44

Issue

9

fYear

2008

Firstpage

576

Lastpage

577

fLanguage

English

Journal_Title

Electronics Letters

Publisher

iet

ISSN

0013-5194

Type

jour

DOI

10.1049/el:20080401

Filename

4497336