Modeling and FEM simulation using fluid-structures interaction of flexible micro-bridge bending within PDMS micro-channel

The manipulation of fluid flow in micro-channel with dimension of hundreds of micrometers has emerged as a distinct new field. In this paper, devices modeling and FEM simulation using Comsol Multiphysics of the fluid-structure interaction applied to PDMS micro-bridge deflection study under various fluid flow rates are presented. The introducing of fluid flow into the micro-channel causes the deflection of the microbridge. The simulation results predict a sensitive bending for low flow rate with an adapted micro-bridge dimension for each micro-channel depth. Thus demonstrate the feasibility of a new concept and open a new area of research in micro-fluidic devices and BioMEMS sensing to obtain higher sensitivity with low fluid flow rate, low coast and low power consumption.