Fabrication and characterization of a solenoid-type microtransformer

Author

Rassel, Richard J. ; Hiatt, C. Fred ; DeCramer, John ; Campbell, Stephen A.

Author_Institution

Univ. of Minnesota, Minneapolis, MN, USA

Volume

39

Issue

1

fYear

2003

fDate

1/1/2003 12:00:00 AM

Firstpage

553

Lastpage

558

Abstract

Solenoid-type microtransformers were fabricated by using a photo-definable thick photoresist and through-hole plating techniques to allow three-dimensional multilayer fabrication of the coils. Primary and secondary coils have a low-frequency inductance of 100 and 80 nH, respectively. Flux leakage is a serious problem on devices with coils on opposite sides of the toroid. Interleaved coils, however, have a coupling constant of 0.9 before falling off at frequencies above 500 kHz. The inductance begins to roll off at about 50 kHz because of core effects. The design has an insertion loss of -19.5 dB at 10 MHz.

Keywords

electroplating; inductors; micromachining; solenoids; transformer cores; -19.5 dB; 10 kHz to 500 MHz; core effects; coupling constant; flux leakage; insertion loss; interleaved coils; low-frequency inductance; magnetic cores; micromachining; photo-definable thick photoresist; planar rectangular toroidal magnetic core; primary coils; secondary coils; solenoid-type microtransformer; three-dimensional multilayer fabrication; through-hole plating techniques; Coils; Fabrication; Frequency; Inductance; Magnetic cores; Magnetic films; Magnetic flux leakage; Solenoids; Toroidal magnetic fields; Transformers;

fLanguage

English

Journal_Title

Magnetics, IEEE Transactions on

Publisher

ieee

ISSN

0018-9464

Type

jour

DOI

10.1109/TMAG.2002.806341

Filename

1179917