DocumentCode

1152324

Title

A silicon wafer scanner

Author

Munro, Deborah

Author_Institution

Bell Telephone Laboratories, Inc., Allentown, Pa., USA

Volume

9

Issue

6

fYear

1973

fDate

6/1/1973 12:00:00 AM

Firstpage

674

Lastpage

674

Keywords

Inspection; Instruments; Laboratories; Laser beams; Lenses; Light scattering; Mirrors; Optical films; Silicon; Telephony;

fLanguage

English

Journal_Title

Quantum Electronics, IEEE Journal of

Publisher

ieee

ISSN

0018-9197

Type

jour

DOI

10.1109/JQE.1973.1077707

Filename

1077707