DocumentCode
1171385
Title
Electron pulse generation at 64 GHz in scanning electron microscope
Author
Thong, J.T.L. ; Breton, B.C. ; Nixon, W.C.
Author_Institution
Cambridge Univ., UK
Volume
25
Issue
15
fYear
1989
fDate
7/20/1989 12:00:00 AM
Firstpage
978
Lastpage
979
Abstract
An electron beam chopping technique has been developed which enables the generation of electron pulses at tens of GHz in an SEM. This is effected by deflecting the beam in a circle and chopping it with a multislot aperture. Electron pulses have been produced at 64 GHz and measured, and a waveform measurement at 18 GHz demonstrates its potential application to electron beam characterisation of very high speed devices and MMICs.
Keywords
electron beam applications; integrated circuit testing; scanning electron microscopes; semiconductor device testing; 64 GHz; electron beam chopping technique; electron pulses; multislot aperture; scanning electron microscope; very high speed devices; waveform measurement;
fLanguage
English
Journal_Title
Electronics Letters
Publisher
iet
ISSN
0013-5194
Type
jour
DOI
10.1049/el:19890654
Filename
31978
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