DocumentCode
1174370
Title
Double beam RF MEMS switches for wireless applications
Author
Lee, K. ; Liu, R. ; Kim, B.C.
Author_Institution
Dept. of Electr. Eng., Arizona State Univ., Tempe, AZ, USA
Volume
39
Issue
6
fYear
2003
fDate
3/20/2003 12:00:00 AM
Firstpage
532
Lastpage
533
Abstract
A double cantilever beam MEMS switch has been developed for wireless applications. The two beams are controlled by a single actuation electrode. This switch has low pull-in voltage of 15 V and fast switching speed of 60 μs. An RF performance with >-50 dB isolation below 5 GHz and <-0.18 dB up to 30 GHz was observed.
Keywords
microswitches; radio equipment; 15 V; 5 to 30 GHz; 60 mus; double cantilever beam MEMS switch; pull-in voltage; single actuation electrode; wireless applications;
fLanguage
English
Journal_Title
Electronics Letters
Publisher
iet
ISSN
0013-5194
Type
jour
DOI
10.1049/el:20030358
Filename
1192214
Link To Document