• DocumentCode
    1175199
  • Title

    Use of a surface-acoustic-wave (SAW) device to measure gas flow

  • Author

    Joshi, Shrinivas G.

  • Author_Institution
    Dept. of Electr., Comput. & Biomed. Eng., Marquette Univ., Milwaukee, WI, USA
  • Volume
    38
  • Issue
    3
  • fYear
    1989
  • fDate
    6/1/1989 12:00:00 AM
  • Firstpage
    824
  • Lastpage
    826
  • Abstract
    The use of a surface-acoustic-wave (SAW) device to measure the rate of gas flow is described. The device is a delay-line stabilized SAW oscillator heated to a suitable temperature above the ambient. Flow of gas carries heat away by convection. This lowers the substrate temperature, thereby causing change in oscillator frequency. The frequency of a 68-MHz oscillator fabricated on Y-Z LiNbO3 substrate increases by more than 160 kHz for variation in flow rate from 0 to 1000 cm3/min
  • Keywords
    acoustic delay lines; flow measurement; flowmeters; lithium compounds; oscillators; stability; substrates; surface acoustic wave devices; 68 MHz; LiNbO3 substrate; delay-line stabilized SAW oscillator; sensor; Delay lines; Fluid flow; Fluid flow measurement; Frequency; Optical surface waves; Oscillators; Surface acoustic wave devices; Surface acoustic waves; Surface resistance; Temperature sensors;
  • fLanguage
    English
  • Journal_Title
    Instrumentation and Measurement, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    0018-9456
  • Type

    jour

  • DOI
    10.1109/19.32201
  • Filename
    32201
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1175199