DocumentCode
1175396
Title
Microfabricated scanning tunneling microscope
Author
Akamine, Shinya ; Albrecht, Thomas R. ; Zdeblick, Mark J. ; Quate, Calvin F.
Author_Institution
Edward L. Ginzton Lab., Stanford Univ., CA, USA
Volume
10
Issue
11
fYear
1989
Firstpage
490
Lastpage
492
Abstract
A scanning tunneling microscope (STM) with dimensions 1000 mu m*200 mu m*8 mu m constructed by planar microfabrication techniques is discussed. The device incorporates a piezoelectric actuator capable of three-dimensional motion for scanning and control of the tunneling gap spacing. Operation of the device has been successfully demonstrated by imaging the surface of a graphite sample with atomic resolution.<>
Keywords
electric actuators; piezoelectric devices; scanning electron microscopes; scanning tunnelling microscopy; C; atomic resolution; control; graphite sample; piezoelectric actuator; planar microfabrication techniques; scanning; scanning tunneling microscope; surface imaging; three-dimensional motion; tunneling gap spacing; Electrodes; Instruments; Microscopy; Motion control; Piezoelectric actuators; Piezoelectric films; Plasma measurements; Surface topography; Tunneling; Zinc oxide;
fLanguage
English
Journal_Title
Electron Device Letters, IEEE
Publisher
ieee
ISSN
0741-3106
Type
jour
DOI
10.1109/55.43113
Filename
43113
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