Plasma-aided manufacturing

Author

Shohet, J.Leon

Author_Institution

Eng. Res. Center for Plasma-Aided Manuf., Wisconsin Univ., Madison, WI, USA

Volume

19

Issue

5

fYear

1991

fDate

10/1/1991 12:00:00 AM

Firstpage

725

Lastpage

733

Abstract

The present and potential applications of plasma-aided manufacturing are discussed and described. Plasma-aided manufacturing is used for producing new materials with unusual and superior properties, for developing new chemical compounds and processes, for machining, and for altering and refining materials and surfaces. Plasma-aided manufacturing has direct applications to semiconductor fabrication, materials synthesis, welding, lighting, polymers, anticorrosion coatings, machine tools, metallurgy, electrical and electronics devices, hazardous waste removal, high-performance ceramics, and many other items in both the high-technology and the more traditional industries in the United States

Keywords

machining; materials preparation; plasma applications; surface treatment; anticorrosion coatings; chemical compounds; chemical processes; electrical devices; electronics devices; hazardous waste removal; high-performance ceramics; lighting; machine tools; machining; materials synthesis; metallurgy; plasma-aided manufacturing; polymers; refining; semiconductor fabrication; surfaces; welding; Chemical compounds; Machining; Manufacturing processes; Plasma applications; Plasma chemistry; Plasma materials processing; Plasma properties; Plasma welding; Semiconductor device manufacture; Semiconductor materials;

fLanguage

English

Journal_Title

Plasma Science, IEEE Transactions on

Publisher

ieee

ISSN

0093-3813

Type

jour

DOI

10.1109/27.108405

Filename

108405