DocumentCode
1183087
Title
Ultrafast carrier dynamics in nitrogen-implanted GaAs
Author
Sinning, S. ; Dekorsy, T. ; Helm, M.
Author_Institution
Forschungszentrum Rossendorf, Dresden, Germany
Volume
151
Issue
5
fYear
2004
Firstpage
361
Lastpage
364
Abstract
The comparative analysis of the ultrafast carrier dynamics of pure GaAs and ion-implanted GaNAs is reported. Different nitrogen concentrations (up to 4%) are implanted and subsequently annealed by rapid thermal annealing (RTA). Damage analysis by channelling Rutherford backscattering (RBS) reveals that the annealing step improves the crystal quality, but does not restore the original quality. From photoreflectance measurements it is concluded that the highest achieved active nitrogen content in the implanted samples is 0.5% for an equivalent implantation dose of 1%. Carrier dynamics are investigated by one-colour pump-probe measurements covering an excitation wavelength range of 730-860 nm (1.7-1.44 eV) with femtosecond time resolution. Comparison with non-implanted GaAs indicates that the carrier relaxation in the implanted samples is dominated by traps associated with implantation damage.
Keywords
III-V semiconductors; Rutherford backscattering; carrier mobility; carrier relaxation time; gallium arsenide; high-speed optical techniques; ion implantation; nitrogen; photoreflectance; rapid thermal annealing; 730 to 860 nm; GaAs:N; Rutherford backscattering; active nitrogen content; carrier dynamics; carrier relaxation; crystal quality; damage analysis; femtosecond time resolution; implantation damage; nitrogen concentrations; nitrogen-implanted GaAs; one-colour pump-probe measurements; optical excitation; photoreflectance measurements; pure GaAs; rapid thermal annealing; ultrafast carrier dynamics;
fLanguage
English
Journal_Title
Optoelectronics, IEE Proceedings -
Publisher
iet
ISSN
1350-2433
Type
jour
DOI
10.1049/ip-opt:20040871
Filename
1367388
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