Finite element analysis of graphene resonator tuned by pressure difference

The vibrational mechanical properties of a graphene resonator were investigated by finite element analysis (FEA) modeling and simulation. By applying a pressure difference across the membrane, the natural frequency of the graphene sheets is changed. The resonance frequency increases with increasing pressure difference. The maximum deflection occurs at the center of graphene. As the initial tension in the graphene increases, the tunable range decreases. Smaller the dimension of the graphene sheets is, higher the resonance frequency will be, and so as the tunable range. The thickness of the graphene sheets has the similar phenomenon as the dimension has, both the frequency and tunable range will increase if the thickness turns smaller. The geometric nonlinearity is considered, too. We compare the simulation results with previous theoretical and experimental results, and find them in good agreement. The pressure difference can be tuned by changing the pressure in and outside the microchamber. These conclusions will be helpful for graphene in the application of high-quality resonators.