DocumentCode
1185831
Title
2006 International Conference on Simulation of Semiconductor Process and Devices
Volume
14
Issue
5
fYear
2005
Firstpage
1209
Lastpage
1209
Abstract
Provides notice of upcoming conference events of interest to practitioners and researchers.
fLanguage
English
Journal_Title
Microelectromechanical Systems, Journal of
Publisher
ieee
ISSN
1057-7157
Type
jour
DOI
10.1109/JMEMS.2005.858909
Filename
1516203
Link To Document