DocumentCode
119099
Title
Fabrication of ZnO nanogenerator potentially to be embedded in flexible printed circuit board
Author
Yanbiao Chu ; Lixi Wan ; Xueping Guo ; Zhongyao Yu
Author_Institution
Microsyst. Packaging Res. Center, Inst. of Microelectron., Beijing, China
fYear
2014
fDate
12-15 Aug. 2014
Firstpage
1552
Lastpage
1555
Abstract
In our work, we fabricated two kinds of flexible Zinc oxide (ZnO) nanogenerators (NG), which could be potentially embedded in flexible printed circuit board (FPC). First, we prepared ZnO nanowires (NWs) by a simple solvothermal method. Zinc acetate and sodium hydroxide (NaOH) were used as the precursors. Ethanol was the solvent. The diameters of most nanowires were around 20 nm to 30 nm, which shows that the synthesized nanowires have a uniform morphology. Then, we fabricated a ZnO nanowires film (NF) by a novel centrifugation method. The ZnO NF was characterized by scanning electron microscope (SEM). The SEM images show that ZnO nanowires were densely and laterally aligned in the NF. Finally, employing general flexible printed circuit process, we fabricated two kinds of ZnO nanogenerators, which can convert mechanical energy in ambient environment to electric energy based on the piezoelectric effect of ZnO nanowires. The fabrication processes are compatible to FPC process, so we think that the flexible nanogenerators can be embedded in FPC to form a self-powered system. The output voltages were tested by ATTEN ADS1102c oscilloscope. The open circuit voltage of PI-substrate nanogenerator can reach up to about 10V, while the max open circuit voltage of Cu-substrate nanogenerator is only 170 mV.
Keywords
flexible electronics; nanoelectronics; nanowires; piezoelectricity; printed circuits; scanning electron microscopy; zinc compounds; ATTEN ADS1102c oscilloscope; FPC board; FPC process; PI-substrate nanogenerator; SEM images; ZnO; ambient environment; centrifugation method; copper-substrate nanogenerator; electric energy; fabrication process; flexible printed circuit board; flexible zinc oxide nanogenerators; general flexible printed circuit process; max open circuit voltage; mechanical energy; open circuit voltage; piezoelectric effect; scanning electron microscopy; self-powered system; sodium hydroxide; solvothermal method; voltage 170 mV; zinc acetate; zinc oxide nanogenerator fabrication; zinc oxide nanowire film; zinc oxide nanowires; Electrodes; Films; Nanowires; Noise measurement; Substrates; Voltage measurement; Zinc oxide; ZnO; flexible printed circuit; nanogenerators; nanowires; piezoelectric;
fLanguage
English
Publisher
ieee
Conference_Titel
Electronic Packaging Technology (ICEPT), 2014 15th International Conference on
Conference_Location
Chengdu
Type
conf
DOI
10.1109/ICEPT.2014.6922950
Filename
6922950
Link To Document